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Optical Profilers Model Thickness
Range		 Field-of-View Spatial
Sampling

Profilm3D

Step-height and surface roughness measurements
Features: VIS and PSI measurement capabilities. 100mm of motorized X, Y, and Z translation. Tip/Tilt Stage.
* With 10X objective lens.
Profilm3D 0.001-500 µm 2.0 x 1.7 mm * 0.88 µm *
Single-Spot
Measurements		 Model Thickness
Range		 Wavelength
Range		 Standard
Spot Size

F3

Reflectance and film-thickness measurements
Features: Compact, low-cost, non-UV systems have 40k-hour light source.
* Thickness measurement capability is optional.
F3-s980 10-1000 µm * 960-1000 nm 10 μm
F3-s1310 15-2000 µm * 1280-1340 nm 10 μm
F3-s1550 25-3000 µm * 1520-1580 nm 10 μm

F10-AR

Reflectance measurement of large flat or curved samples
Features: Handheld probe for large samples and maximum versatility.
* Thickness measurement capability is optional.
F10-AR 0.2-15 µm * 380-1050 nm 100 μm
Single-Spot
Measurements		 Model Thickness
Range		 Wavelength
Range		 Standard
Spot Size

F10-RT

Reflectance and/or transmittance measurement
Features: Simultaneous measurement of R and T. Built-in video.
* Thickness measurement capability is optional.
F10-RT 0.015-70 µm * 380-1050 nm 5000 μm
F10-RT-EXR 0.015-150 µm * 380-1700 nm 5000 μm
F10-RT-NIR 0.1-150 µm * 950-1700 nm 5000 μm
F10-RT-UV 0.003-40 µm * 190-1100 nm 5000 μm
F10-RT-UVX 0.003-150 µm * 190-1700 nm 5000 μm

F20

The world's best-selling thin-film measurement system
Features: Our most versatile model. Includes full thickness and index measurement capabilities.
F20 0.015-70 µm 380-1050 nm 1500 μm
F20-EXR 0.015-250 µm 380-1700 nm 1500 μm
F20-NIR 0.1-250 µm 950-1700 nm 1500 μm
F20-UV 0.003-40 µm 190-1100 nm 1500 μm
F20-UVX 0.003-250 µm 190-1700 nm 1500 μm
F20-XT 0.2-450 µm 1440-1690 nm 1500 μm

F40

Microscope-based thin-film measurement system
Features: Attach to a microscope. Very small spot size.
F40 0.02-20 µm 400-850 nm 1 μm
F40-EXR 0.02-40 µm 400-1700 nm 1 μm
F40-NIR 0.04-40 µm 950-1700 nm 1 μm
F40-UV 0.004-40 µm 190-1100 nm 7 μm
F40-UVX 0.004-40 µm 190-1700 nm 7 μm