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Single-Spot
Measurements		 Model Thickness
Range		 Wavelength
Range		 Standard
Spot Size

F3

Reflectance and film-thickness measurements
Features: Compact, low-cost, non-UV systems have 40k-hour light source.
* Thickness measurement capability is optional.
F3 0.015-70 µm * 380-1050 nm 100 μm
F3-NIR 0.1-250 µm * 950-1700 nm 100 μm
F3-UV 0.003-40 µm * 190-1100 nm 100 μm
F3-XT 0.2-450 µm * 1440-1690 nm 100 μm

F3-CS

Hands-free reflectance measurement of flat samples
Features: Compact, hands-free.
* Thickness measurement capability is optional.
F3-CS 0.015-70 µm * 380-1050 nm 100 μm
In-line
Measurements		 Model Thickness
Range		 Wavelength
Range		 Standard
Spot Size

F30

Complete in-line thickness monitor
Features: Optional high-speed photodiode detectors.
F30 0.015-70 µm 380-1050 nm 1500 μm
F30-EXR 0.015-250 µm 380-1700 nm 1500 μm
F30-NIR 0.1-250 µm 950-1700 nm 1500 μm
F30-UV 0.003-40 µm 190-1100 nm 1500 μm
F30-UVX 0.003-250 µm 190-1700 nm 1500 μm
F30-XT 0.2-450 µm 1440-1690 nm 1500 μm

F32

Compact solution for in-line measurements
Features: Includes spectrometer(s), software, and 10k-hour light source.
F32 0.015-70 µm 380-1050 nm 1500 μm
F32-EXR 0.015-250 µm 380-1700 nm 1500 μm
F32-NIR 0.1-250 µm 950-1700 nm 1500 μm
F32-UV 0.003-40 µm 190-1100 nm 1500 μm
F32-UVX 0.003-250 µm 190-1700 nm 1500 μm
F32-XT 0.2-450 µm 1440-1690 nm 1500 μm
F32-s980 10-1000 µm * 960-1000 nm 10 μm
F32-s1310 15-2000 µm * 1280-1340 nm 10 μm
F32-s1550 25-3000 µm * 1520-1580 nm 10 μm
Multi-Point Mapping Model Thickness
Range		 Wavelength
Range		 Standard
Spot Size

F50

Measures thickness etc. at two points/second
Features: Sample chucks (up to 300mm) sold separately.
F50 0.02-70 µm 380-1050 nm 1500 μm
F50-EXR 0.02-250 µm 380-1700 nm 1500 μm
F50-NIR 0.1-250 µm 950-1700 nm 1500 μm
F50-UV 0.005-40 µm 190-1100 nm 1500 μm
F50-UVX 0.005-250 µm 190-1700 nm 1500 μm
F50-XT 0.2-450 µm 1440-1690 nm 1500 μm
F50-s980 4-1000 µm 960-1000 nm 10 μm
F50-s1310 7-2000 µm 1280-1340 nm 10 μm
F50-s1550 10-3000 µm 1520-1580 nm 10 μm

F50-450

Measures thickness on 450mm wafers
Features: Sample chucks (up to 450mm) sold separately.
F50-450 0.02-70 µm 380-1050 nm 1500 μm
F50-450-EXR 0.02-250 µm 380-1700 nm 1500 μm
F50-450-NIR 0.1-250 µm 950-1700 nm 1500 μm
F50-450-UV 0.005-40 µm 190-1100 nm 1500 μm
F50-450-UVX 0.005-250 µm 190-1700 nm 1500 μm

F50-XY

Measures thickness on large panels
Features: LCD panels are a common application.
F50-XY 0.02-100 µm 380-1050 nm 1500 μm
F50-XY-EXR 0.02-250 µm 380-1700 nm 1500 μm
F50-XY-NIR 0.1-250 µm 950-1700 nm 1500 μm
F50-XY-UV 0.005-40 µm 190-1100 nm 1500 μm
F50-XY-UVX 0.005-250 µm 190-1700 nm 1500 μm
F50-XY-XT 0.2-450 µm 1440-1690 nm 1500 μm

F54

Automated film thickness mapping
Features: Sample chucks (up to 450mm) sold separately.
F54 0.02-40 µm 400-850 nm 7 μm
F54-EXR 0.02-100 µm 400-1700 nm 7 μm
F54-NIR 0.04-100 µm 950-1700 nm 7 μm
F54-UV 0.004-30 µm 190-1100 nm 7 μm
F54-UVX 0.004-100 µm 190-1700 nm 7 μm

F60-t

Production-oriented film thickness mapping
Features: Includes notch-finding, on-board baselining, and safety interlock.
F60-t 0.02-70 µm 380-1050 nm 1500 μm
F60-t-EXR 0.02-250 µm 380-1700 nm 1500 μm
F60-t-NIR 0.1-250 µm 950-1700 nm 1500 μm
F60-t-UV 0.005-40 µm 190-1100 nm 1500 μm
F60-t-UVX 0.005-250 µm 190-1700 nm 1500 μm
F60-t-XT 0.2-450 µm 1440-1690 nm 1500 μm
F60-t-s980 4-1000 µm 960-1000 nm 10 μm
F60-t-s1310 7-2000 µm 1280-1340 nm 10 μm
F60-t-s1550 10-3000 µm 1520-1580 nm 10 μm