Optical Profilers	Model	Thickness Range	Field-of-View	Spatial Sampling
Profilm3D	Step-height and surface roughness measurements Features: VIS and PSI measurement capabilities. 100mm of motorized X, Y, and Z translation. Tip/Tilt Stage. * With 10X objective lens.
	Profilm3D	0.001-500 µm	2.0 x 1.7 mm *	0.88 µm *

Single-Spot Measurements	Model	Thickness Range	Wavelength Range	Standard Spot Size
F3	Reflectance and film-thickness measurements Features: Compact, low-cost, non-UV systems have 40k-hour light source. * Thickness measurement capability is optional.
	F3-NIR	0.1-250 µm *	950-1700 nm	100 μm
	F3-XT	0.2-450 µm *	1440-1690 nm	100 μm
	F3-s980	10-1000 µm *	960-1000 nm	10 μm
	F3-s1310	15-2000 µm *	1280-1340 nm	10 μm
	F3-s1550	25-3000 µm *	1520-1580 nm	10 μm

Single-Spot Measurements	Model	Thickness Range	Wavelength Range	Standard Spot Size
F10-RT	Reflectance and/or transmittance measurement Features: Simultaneous measurement of R and T. Built-in video. * Thickness measurement capability is optional.
	F10-RT-EXR	0.015-150 µm *	380-1700 nm	5000 μm
	F10-RT-NIR	0.1-150 µm *	950-1700 nm	5000 μm
	F10-RT-UVX	0.003-150 µm *	190-1700 nm	5000 μm
F20	The world's best-selling thin-film measurement system Features: Our most versatile model. Includes full thickness and index measurement capabilities.
	F20-EXR	0.015-250 µm	380-1700 nm	1500 μm
	F20-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F20-UVX	0.003-250 µm	190-1700 nm	1500 μm
	F20-XT	0.2-450 µm	1440-1690 nm	1500 μm

In-line Measurements	Model	Thickness Range	Wavelength Range	Standard Spot Size
F30	Complete in-line thickness monitor Features: Optional high-speed photodiode detectors.
	F30-EXR	0.015-250 µm	380-1700 nm	1500 μm
	F30-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F30-UVX	0.003-250 µm	190-1700 nm	1500 μm
	F30-XT	0.2-450 µm	1440-1690 nm	1500 μm
F32	Compact solution for in-line measurements Features: Includes spectrometer(s), software, and 10k-hour light source.
	F32-EXR	0.015-250 µm	380-1700 nm	1500 μm
	F32-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F32-UVX	0.003-250 µm	190-1700 nm	1500 μm
	F32-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F32-s980	10-1000 µm *	960-1000 nm	10 μm
	F32-s1310	15-2000 µm *	1280-1340 nm	10 μm
	F32-s1550	25-3000 µm *	1520-1580 nm	10 μm

Multi-Point Mapping	Model	Thickness Range	Wavelength Range	Standard Spot Size
F50	Measures thickness etc. at two points/second Features: Sample chucks (up to 300mm) sold separately.
	F50-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F50-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F50-UVX	0.005-250 µm	190-1700 nm	1500 μm
	F50-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F50-s980	4-1000 µm	960-1000 nm	10 μm
	F50-s1310	7-2000 µm	1280-1340 nm	10 μm
	F50-s1550	10-3000 µm	1520-1580 nm	10 μm
F50-450	Measures thickness on 450mm wafers Features: Sample chucks (up to 450mm) sold separately.
	F50-450-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F50-450-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F50-450-UVX	0.005-250 µm	190-1700 nm	1500 μm
F50-XY	Measures thickness on large panels Features: LCD panels are a common application.
	F50-XY	0.02-100 µm	380-1050 nm	1500 μm
	F50-XY-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F50-XY-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F50-XY-UVX	0.005-250 µm	190-1700 nm	1500 μm
	F50-XY-XT	0.2-450 µm	1440-1690 nm	1500 μm
F54	Automated film thickness mapping Features: Sample chucks (up to 450mm) sold separately.
	F54-EXR	0.02-100 µm	400-1700 nm	7 μm
	F54-NIR	0.04-100 µm	950-1700 nm	7 μm
	F54-UVX	0.004-100 µm	190-1700 nm	7 μm
F60-t	Production-oriented film thickness mapping Features: Includes notch-finding, on-board baselining, and safety interlock.
	F60-t-EXR	0.02-250 µm	380-1700 nm	1500 μm
	F60-t-NIR	0.1-250 µm	950-1700 nm	1500 μm
	F60-t-UVX	0.005-250 µm	190-1700 nm	1500 μm
	F60-t-XT	0.2-450 µm	1440-1690 nm	1500 μm
	F60-t-s980	4-1000 µm	960-1000 nm	10 μm
	F60-t-s1310	7-2000 µm	1280-1340 nm	10 μm
	F60-t-s1550	10-3000 µm	1520-1580 nm	10 μm

Apply Filters

What do you want to measure?

Do you have a preferred wavelength range?

What's the thinnest layer you want to measure?

What's the thickest layer you want to measure?

Do you have a spot size constraint?

Are any of your samples curved?

Do you want a real-time image of your sample?

Profilm3D

F3

F10-RT

F20

F30

F32

F50

F50-450

F50-XY

F54

F60-t